Advancing Sustainable Silicon Nitride Photonics: Low- Temperature Deposition Techniques for High-Performance Chip-Scale Laser Integration

Silicon nitride (SiN) allows for the realization of highperformance devices in silicon photonics, but its processing presents inefficiencies that challenge sustainable large-scale implementation.

Research question

We will explore more sustainable methods for constructing ultra-low-loss SiN waveguides in the 1.5μm band, understand the fundamental limits of optical losses, and develop high-performance lasers on SiN using microtransfer printing of semiconductor chiplets.

Sustainability aspects

This project addresses sustainability concerns by exploring alternative lowtemperature deposition methods, aiming to achieve ultra-low-loss SiN waveguides, and an efficient utilization of semiconductor materials by microtransfer printing, ensuring the environmental viability of high-performance photonic circuits in various applications.